High-speed laser defect scanner for substrates
Defect inspection imaging device that visualizes defects in substrates such as glass substrates, semiconductor substrates, and display substrates.
High-speed laser defect scanner for substrates, PrimaScan series. It is a defect inspection imaging device that visualizes defects on substrates such as glass substrates, semiconductor substrates, and display substrates. It achieves high-speed measurements and high PSL particle sensitivity in the nanometer range. Compatible with transparent, translucent, and opaque substrates. The lineup includes PrimaScan, PrimaScan R&D, and PrimaScan P, catering to sample sizes up to 600mm x 600mm. It can be used for wafer incoming inspection, wafer chuck inspection, inspection of blanket films (wafer with film), inspection of internal stress and gaps in micro-lens arrays for AR/VR/MR applications, and inspection of coating defects in photoresists.
